Structure and Tribo-Mechanical Properties of MoSx:N:Mo Thin Films Synthesized by Reactive dcMS/HiPIMS

Abstract Modifying MoS 2 thin films by additional elements shows great potential in order to adjust the property profile and meet increasing requirements regarding high wear resistance low friction properties of industrial components. Within that context, x :N:Mo were deposited a reactive hybrid dcMS/HiPIMS process. By systematically Mo target cathode power, an investigation structural mechanical was conducted understand evolution tribological behavior. A power 1 kW is related formation preferential (002) basal-plane thus with µ = 0.2. With amount Mo, film loses its solid lubricant nitride constitution developing due crystalline MoN phases. Related this transformation, hardness elastic modulus are increased, but adhesion impaired. The plasticity generated material directly removed from contact area during sliding contact.